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The scope of this Standard is limited to the usage and description of interbay and intrabay AMHS transport equipment (OHT
注意： 本文書は2008年全面的に書き換えられた。
5 These test methods also have been applied to the determination of the width of the denuded zone in silicon wafers
The document details properties and functions of variables related to susceptors and wafers which are used in the HB-LED manufacturing process on the basis of SEMI HB4
This document incorporates pertinent dimensional data from SEMI D18
P00100 - SEMI P1 - ハードサーフェス・フォトマスク用基板 Revision:SEMI P1-0708E - Inactive The scope of this StandardNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Micropatterning Committee2008513global Audits and Reviews Subcommittee20086www. semi. org1981200111 E 20096A1 1 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status
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