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The purpose of this Document is to define a method for testing process panels intended for installation in high-purity gas distribution systems
or with epitaxial film
Calibration factors are given for each element
SEMI MF1188-1107 (Reapproved 0718)
Equipment Communications Standard (SECS-I)
M01200 - SEMI M12 - Specification for Serial Alphanumeric Marking of Silicon Wafers StdPbc-1121 The purpose of this DocumentThis Specification describes a coded alphanumeric marking of silicon or other semiconductor wafers. The wafer alphanumeric code links the properties of the wafer stored in an appropriate database system to each individual wafer for purposes of tracking and control during wafer and device manufacture. Use of this Specification ensures the consistency of all wafers marking performed by silicon manufacturers. This consistency allows simplification of the
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