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SEMI E4-0418 (technical revision)
Welds performed following these procedures are of sufficient quality to provide the required system purity
Packaging and transport materials
SEMI E121-1017 (Reapproved 0423)
SEMI E54-0316 (Reapproved 0124)
E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases StdPbc-0714 SEMI E4-0418 (technical revision)The purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC. This procedure describes a method to determine the MFC conversion factor and function between two gases. This Standard provides a common basis for communication between manufacturers and users. The intent of this Standard is not to suggest any