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C01600 - SEMI C16 - Guide for Precision and Data Reporting Practices Revision:SEMI C16-0299 (Withdrawn 1110) - Withdrawn 1-0703 (Reapproved 0623)

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Description

1-0703 (Reapproved 0623)

Verifying the characteristic impedance of the RF cable assembly

ここに説明する測定方法は,半導体製造環境における物体および表面上の一般的な静電気電荷,電圧,電界レベル,および静電気放電 (ESD) の特性を表すために利用できる。本書では,適用可能な装置,校正,および測定技術を説明している。付属書には,機器の具体例および校正手順に関する予備情報に加えて有益な一般的静電気調査に関する情報および助言を含んでいる。

Tetramethylcyclotetrasiloxane) used in the semiconductor industry

Producers and users of the silicon wafers and reticles used in semiconductor manufacturing will also find it useful

C01600 - SEMI C16 - Guide for Precision and Data Reporting Practices Revision:SEMI C16-0299 (Withdrawn 1110) - Withdrawn 1-0703 (Reapproved 0623)This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www. semi. org in October 2010. Originally published in 1997; previously published March 2005. NOTICE: This document was balloted and approved for withdrawal in 2010. To provide a minimal set of guidelines for precision and data reporting

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