E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices StdPbc-0822 consistency and reduction to increase

consistency and reduction to increase confidence in the accuracy and repeatability of EPOC’s

SEMI E63-0298 (technical revision)

choked flow parameters

The PSEM300 extends the generic Process State Model of SEMI E30 (GEM) with a Specific Process State model for prober equipment

自動搬送用は，ウェーハキャリアと自動ウェーハプロセス装置のインタフェースの使用上の要求事項を満たすものである。自動搬送用は125 mmウェーハサイズを対象としている。

E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices StdPbc-0822 consistency and reduction to increaseNOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects that are common to all endpoint devices (EPD) on a semiconductor equipment