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Theses defects can be categorized by their origin
SEMI M77-1015 (technical revision)
SEMI G73-0519 (Reapproved 0526)
B：形状測定を使用した段差法
1-0414 (technical revision)
F01300 - SEMI F13 - Guide for Gas Source Control Equipment StdPbc-0512 Theses defects can be categorizedThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on August 27, 2001. Initially available at www. semi. org September 2001; to be published November 2001. Originally published in 1993. The purpose of this document is to provide a guide for the design and operational requirements
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