Pay in 4 interest-free payments of $48.25 Learn more
Ships within 48 hours · Estimated delivery Jul 28 - Aug 2
6-95 (technical revision)
SEMI C71-0421 (technical revision)
本文書の目的は，半導体産業で使用されるトリメチルホスフィンに対する要求条件を標準化し，またこれらのスタンダードをサポートする試験手順を標準化することである。試験方法は，統計的に有効な結果を示している。
1 Purpose
org in November 2016
C00323 - SEMI C3.23 - Standard for Oxygen (O2), 99.98% Quality Revision:SEMI C3.23-1000 (Withdrawn 1104) - Withdrawn 6-95 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 11, 2004. Available at www. semi. org in November 2004; originally published in 1984; previously published in 1995. NOTICE: This Document was balloted and approved for withdrawal in 2004. Oxygen is a colorless, odorless, and oxidizing gas. It supports combustion. Referenced SEMI