E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdPbc-0814 and behavior that compliant intelligent

and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39

This Standard addresses:

defect classification code management

particularly SEMI P35

E This standard was editorially modified in February 2007 to correct an error

E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates StdPbc-0814 and behavior that compliant intelligentThe purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates. This Guide contains definitions