M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 Revision:SEMI M15-0298 - Inactive and iron areal densities between

Name: M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 Revision:SEMI M15-0298 - Inactive and iron areal densities between
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and iron areal densities between 109 and 1014 atoms/cm2

SEMI C21-0600 (technical revision)

it distinguishes between mechanical and diffusion leak rates

orgで入手可能となる。初版は1989年発行，前版は2003年1１月発行。

SEMI M18 — Guide for Developing Specification Forms for Order Entry of Silicon Wafers

M01500 - SEMI M15 - 半絶縁ガリウムヒ素ウェーハ用の鏡面ウェーハの許容表面欠陥表 Revision:SEMI M15-0298 - Inactive and iron areal densities betweenGaAs Referenced SEMI Standards None.

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