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This Standard is intended to set levels of specification for glass substrates to insure repeatable manufacture of flat panel displays and uniformity of substrates from all vendors
SEMI E29-93 (first published)
SEMI E109-0703 (technical revision)
The purpose of the Guide is to avoid prolonged rinse-up of the new HPIX when it is loaded into ion exchange (polish) tanks
orgで。初版は2001年11月に発行された。
C00334 - SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality Revision:SEMI C3.34-92 - Superseded This Standard is intended toThe purpose of this Standard is to provide a specification for disilane (Si2H6) used in the semiconductor industry. This Standard covers requirements for disilane (Si2H6) used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline. Referenced SEMI Standards (purchase separately) SEMI C3 Specification for Gases Revision History SEMI C3. 34 0116 (Reapproved 0922) SEMI C3. 34 0116 (technical
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