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SEMI D63-0811 (first published)
This Standard can be used as a guide for equipment manufacturers during the design and testing of their equipment
Both the active and passive equipment manage this operation
This specification was technically approved by the Global Flat Panel Display – Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee
To comply with this Specification
E10900 - SEMI E109 - Specification for Reticle and Pod Management (RPMS) Revision:SEMI E109-1017 - Superseded SEMI D63-0811 (first published)This Specification provides standardized behavior for lithography, reticle inspection, and bare reticle stocker equipment. It also provides for standardized communication with lithography, reticle inspection, and bare reticle stocker equipment. This includes the coordination, execution, and completion of automated and manual reticle pod transfers to and from the equipment, transfer of reticles to and from the reticle pods, movement of the reticles
US$ 99.00
US$ 249.50
US$ 249.50
US$ 399.50