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SEMI E54-96 (first published)
the externally visible data structures and behaviors of devices utilizing the Modbus/TCP networking capability in a SEMI compliant SAN system
it distinguishes between mechanical and diffusion leak rates
wafer level packages
FTV)系統和空中行駛車輛(overhead traveling vehicle
E10000 - SEMI E100 - 6インチまたは230 mmのレチクルの搬送および保管に用いられるレチクルSMIFポッド（RSP）の仕様 Revision:SEMI E100-1104 - Superseded SEMI E54-96 (first published)Global Physical Interfaces and Carriers Committee2010430Global Audits and Reviews Subcommittee20106www. semi. org20002200411 IC6230 mmSMIF PODRSP Referenced SEMI Standards SEMI E1. 9 Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E19. 4 200 mm Standard Mechanical Interface (SMIF) SEMI E30. 1 Inspection and Review Specific Equipment Model (ISEM) SEMI E47. 1 Mechanical Specification for FOUPS Used to Transport and
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