E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas Revision:SEMI E163-0212 (Reapproved 1217) - Inactive previously published October 2011

Name: E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas Revision:SEMI E163-0212 (Reapproved 1217) - Inactive previously published October 2011
Brand: sef-hvh.nl
SKU: 58732884079
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Description

previously published October 2011

SEMI 3D11-1214 (Reapproved 0420)

person guided vehicle or overhead hoist vehicle)

These terms apply to photomasks that are principally used in fabricating flat panel display

SEMI E5-0301 (technical revision)

E16300 - SEMI E163 - Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas Revision:SEMI E163-0212 (Reapproved 1217) - Inactive previously published October 2011The purpose of this Document is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment and facilities. It is a Guide for establishing optimum electrostatic compatibility of the handling environment for reticles and other items that are extremely electrostatic sensitive (EES) to electrostatic charge, voltage, and electric field. This Guide is complementary to SEMI E78 and

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