P01300 - SEMI P13 - Determination of Sodium and Potassium in Positive Photoresists by Atomic Absorption Spectroscopy Revision:SEMI P13-91 (Reapproved 1104) - Inactive SEMI E25 — Cluster Tool

SEMI E25 — Cluster Tool Module Interface: Module Access Guideline

and electrofluidic devices

Flat Panel Display）（FPD）用ガラス基板を，FPD製造工程で使用されている試薬を用いて定量的に評価する。

orgで，そして2007年11月にCD-ROMで入手可能となる。初版は1999年2月発行，前版は2005年11月に発行された。

The test is performed with designed mini modules in a pressure cooker with moisture condensing or moisture saturated steam environments

P01300 - SEMI P13 - Determination of Sodium and Potassium in Positive Photoresists by Atomic Absorption Spectroscopy Revision:SEMI P13-91 (Reapproved 1104) - Inactive SEMI E25 — Cluster ToolThis standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the North American Micropatterning Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1991. NOTICE: This Standard or Safety Guideline has an Inactive Status because the